Semiconductor packaging hydrogen nitrogen intelligent gas distribution equipment

The intelligent hydrogen and nitrogen gas distribution equipment for semiconductor packaging adopts a fully automatic hydrogen and nitrogen gas distribution equipment with a thermal mass flowmeter and a mass flow transmitter as the main body. The self written program is completed in the PLC. Under the action of pressure sensors and pneumatic valves, the mass flowmeter calculates the nitrogen output flow rate and transmits the data to the mass flow transmitter to strictly control the injection amount of hydrogen gas, ignoring the original gas pressure and flow rate changes. Accurate gas distribution is always obtained at the point of use of the mixed gas. The hydrogen analyzer at the output end of the mixed gas monitors and verifies the hydrogen content in the mixed gas. The touch screen completes data acquisition, and all parameters are clear and visible. The gas distribution ratio is changed, and it can be completed and stored with one click. The equipment has an interlocking interlock function to prevent misoperation. The data output end is equipped with a 485 interface, which can complete data remote transmission online and remotely control equipment work Principle;

The intelligent hydrogen and nitrogen gas distribution equipment for semiconductor packaging enters the proportioning cabinet. After the hydrogen and nitrogen gases are depressurized and stabilized at the gas inlet, various digital gas flow meters indicate the flow rate and pressure of each gas. Then, the amount to be injected is calculated and controlled by PLC to achieve the required mixing content for proportioning. The ratio automatically adjusts the content of hydrogen and nitrogen that needs to be added when the flow rate changes in the later stage, and the analyzer monitors the percentage content ratio of the ratio gas in real time. The proportioning cabinet adopts touch screen display and control of gas distribution parameters, which has the following advantages.

1. Using a digital flowmeter to display the real-time gas consumption of each gas channel.

2. When there is fluctuation in import pressure, the amount added will be automatically adjusted and the proportion content will be maintained.

3. High precision pressure sensors provide real-time control and monitoring of mixed gas pressure.

4. Set up various alarms to ensure the normal operation of the proportioner to the maximum extent possible.

5. The gas distribution device adopts a box type structure, consisting of an independent control cabinet and a gas distribution actuator. To complete remote control, it is necessary

6. The electrical cabinet is designed to be fully enclosed, with nitrogen filled positive pressure protection. In addition to protecting the electrical system, it also has explosion-proof isolation effect (optional)

7. Install a high-precision filter with particles smaller than 0.1um at the original air inlet to effectively protect the mass flow controller and eliminate potential hazards.

8. Adjust the gas distribution parameters, with clear interface, digital input, one click operation, one click storage, instantaneous gas distribution, and interlock interlocking function to absolutely prevent misoperation.

9. Equipped with multiple self written programs, it fills the gap in linear measurement of mass flow meters, automatically triggers conversion programs in low flow states, and provides stable gas supply.

10. Humanized design of the overall cabinet: mobile casters, fast and convenient to move, with fixed balance support.